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Kwai
Bilibili
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Vacuum coating solution

Chemical Vapor Deposition System (CVD)


Product overview

The QY-CVD series chemical vapor deposition system is a chemical technology that mainly utilizes one or several gas-phase compounds or elements containing thin film elements to generate thin films through chemical reactions on the substrate surface. Widely used for purifying substances, developing new crystals, and depositing various single crystal, polycrystalline, or glassy inorganic thin film materials.

产品特点
PRODUCTFEATURE
  1. High product integration and automated control

  2. PLC programming, visual display settings

  3. Complete safety interlock design and warning system

产品规格
PRODUCTPARAMETER
Product model QY- CVD
Device TypeMonomer machine
Ultimate pressure5×10⁻⁴Pa
Vacuum system configurationDiffusion pump/molecular pump/low-temperature pump+(Roots pump)+rotary vane pump/screw pump
FixtureFlat
Drying temperature≤600℃
Coating thickness≤500nm
Electrodeplate-type
Power supplyRadio frequency