Function Unit
Function unit
Magnetron Sputtering Cathode Target QY-MSC Series Magnetron Sputtering Cathode (Magnetron Sputtering Target)
Product overview
产品特点
PRODUCTFEATURE
Magnetic furnace relies on finite element design, with high utilization rate of target materials
Precise waterway design, permanent magnet and cooling water isolation, small temperature rise of the target, and long-term continuous stable operation
Complete electrical and magnetic shielding of the target body, compatible with AC and DC sputtering
Advanced and reasonable structure, easy to install and replace target materials
产品规格
PRODUCTPARAMETER
| Dimensions of circular magnetron target surface (mm) | Φ50 Φ75 Φ100 Φ150 Φ200 |
| Rectangular magnetron target surface size (mm) | Long: According to user usage requirements; Width: 80/100/120/150/200/300; Thickness: 1-20 (magnetic material 1-6) |
| Maximum specific power (power density) | ≤20W/cm² |
| Working pressure (Pa) | 5×10⁻¹～8×10⁻²Pa |